Ink-jet head having nozzle openings with a constant width and manufacturing method thereof
US5992974A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jul 3, 1996 |
| Grant date | Nov 30, 1999 |
| Priority date | — |
| Expiry date | Jul 3, 2016 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2002/14411
- WIPO fieldTextile and paper machines
- WIPO sectorMechanical engineering
Abstract
A nozzle plate has a plurality of nozzles for discharging ink which is fed from an ink reservoir through ink supply ports to ink cavities which are pressurized by a pressurizing element. In the nozzle plate, nozzle openings are formed in a silicon monocrystalline substrate with a lattice face (110) by anisotropic etching in such a way that through holes have faces (1-11) and (-11-1) in the direction in which the nozzle openings are arrayed as well as faces (111) and (11-1) in the direction of the axis of the ink cavity. The nozzle openings can be formed so as to have the faces (1-11) and (-11-1) normal to the silicon monocrystalline substrate in the direction in which the nozzle openings are arrayed. The width of the nozzle opening becomes constant irrespective of the time required to etch the substrate.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.