Patent · US Expired

Vacuum treatment system for depositing thin coatings

US5993556A · kind A · utility

8Cited by

4References

4Claims

0Family size

Assignee

Leybold Systems GmbH · DE

Inventors

Hans Maidhof · Goldbach, DE
Hans Schussler · Bad Marienberg, DE
Stefan Kunkel · Aschaffenburg, DE
Johannes Beul · Rehe, DE

Key dates

Filing date	Apr 9, 1998
Grant date	Nov 30, 1999
Priority date	—
Expiry date	Apr 9, 2018

Classification

Technology area (CPC C)Chemistry; Metallurgy
CPC primaryC23C14/56
WIPO fieldSurface technology, coating
WIPO sectorChemistry

Abstract

A vacuum treatment system for depositing thin coatings on substrates, with several stationary treating chambers that are held by the annular or frame-like side wall of the vacuum chamber and display the treatment tools and with treatment chamber openings aligned peripherally inward on the center of the vacuum chamber and extending in planes parallel to each other, a shaft, extending parallel to the opening planes and mounted in the vacuum chamber lid and/or in the vacuum chamber bottom plate of the vacuum chamber, is provided that moves the plates for closing the treatment chamber openings and is supplied with actuators for moving the closing plates from a radially inner opening position to a radially outer closing position, whereby the actuators working together with the shaft are designed as lever pinions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.