Patent · US Expired

Electrode structure, electrolytic etching process and apparatus

US5993637A · kind A · utility

47Cited by
10References
49Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 3, 1997
Grant dateNov 30, 1999
Priority date
Expiry dateDec 3, 2017

Classification

  • Technology area (CPC Y)Emerging Cross-Sectional Technologies
  • CPC primaryY02E10/548
  • WIPO fieldSurface technology, coating
  • WIPO sectorChemistry

Abstract

An electrode structure is constituted by a first electrode, and at least one second electrode providing a pair of opposite portions with a prescribed spacing therebetween at which the first electrode is disposed. The electrode structure is suitably used for electrolytic etching and is effective in providing an accurate etching pattern without damaging the surface of an etching object.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.