Microprobe, preparation thereof and electronic device by use of said microprobe
US5994698A · kind A · utility
21Cited by
6References
50Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 9, 1994 |
| Grant date | Nov 30, 1999 |
| Priority date | — |
| Expiry date | May 9, 2014 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/874
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A microprobe is provided which comprises a single crystal provided on a part of one main surface of a substrate or a part of a thin film formed on one main surface of the substrate. The microprobe may have a single crystal having an apex portion surrounded by facets having a specific plane direction and comprising a specific crystal face. The method for preparing the microprobe and an electronic device employing the microprobe also provided which is useful for recording and reproducing.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.