Subject positioning device for optical interferometer
US5995222A · kind A · utility
6Cited by
3References
30Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Dec 30, 1996 |
| Grant date | Nov 30, 1999 |
| Priority date | — |
| Expiry date | Dec 30, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/2441
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A subject positioning device for an interferometer includes a positioning mechanism for positioning a test surface within an axial extent of interference positions in the object beam path, which is less than double of a thickness of the subject, and at least one positioning lens placed between a beam splitter and the axial extent of interference positions in the object beam path with a focal point located within the axial extent of interference positions.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.