Patent · US Expired

Subject positioning device for optical interferometer

US5995222A · kind A · utility

6Cited by
3References
30Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 30, 1996
Grant dateNov 30, 1999
Priority date
Expiry dateDec 30, 2016

Classification

  • Technology area (CPC G)Physics
  • CPC primaryG01B11/2441
  • WIPO fieldMeasurement
  • WIPO sectorInstruments

Abstract

A subject positioning device for an interferometer includes a positioning mechanism for positioning a test surface within an axial extent of interference positions in the object beam path, which is less than double of a thickness of the subject, and at least one positioning lens placed between a beam splitter and the axial extent of interference positions in the object beam path with a focal point located within the axial extent of interference positions.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.