Semiconductor wafer storage apparatus and semiconductor device fabricating apparatus using said apparatus
US5997398A · kind A · utility
18Cited by
8References
3Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 18, 1996 |
| Grant date | Dec 7, 1999 |
| Priority date | — |
| Expiry date | Apr 18, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S414/135
- WIPO fieldThermal processes and apparatus
- WIPO sectorMechanical engineering
Abstract
A semiconductor wafer storage apparatus includes a wafer storage unit main body and a gas supply unit with a chemical filter, the gas supply unit being arranged independently of the wafer storage unit.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.