Method for analyzing impurities in gas and its analyzer
US6000275A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Apr 23, 1998 |
| Grant date | Dec 14, 1999 |
| Priority date | — |
| Expiry date | Apr 23, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J49/0009
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
A method of analysis of an impurity in a gas is characterized in that an impurity gas in a sample gas is quantified by ionizing the sample gas, and measuring by a mass spectrometer 6 the intensity of cluster ions which are formed from a main component gas and an impurity gas in the sample gas. In addition, a device for analysis of an impurity in a gas is characterized by comprising a mass spectrometer 6 having a means for ionizing a gas which is introduced thereinto, an analysis line 4 which introduces a sample gas into the aforesaid mass spectrometer 6, and a calibration line 10 which adjusts a concentration of an impurity in the sample gas and thereafter introduces the gas into the aforesaid mass spectrometer 6.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.