Process for fabricating a magnetic recording medium
US6001431A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Feb 21, 1996 |
| Grant date | Dec 14, 1999 |
| Priority date | — |
| Expiry date | Feb 21, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S427/106
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A process for depositing a diamond-like carbon film, which comprises providing a means for generating a sheet-like beam-type plasma region inside a vacuum vessel for depositing the diamond-like carbon film, and depositing the film on a substrate being moved through said plasma region. Also claimed is an apparatus for fabricating a magnetic recording medium by sequentially and continuously forming a magnetic layer and a diamond-like carbon film on a polymer substrate material, which comprises at least a first vacuum vessel for forming the magnetic layer of the magnetic recording medium and a second vacuum vessel for forming the diamond-like carbon film, provided that the pressure difference between the operation pressures for the first vessel and the second vessel is set in the range of from 10.sup.-2 to 10.sup.-5 Torr.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.