Manufacture of tapered waveguides
US6003222A · kind A · utility
21Cited by
5References
16Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Jul 10, 1997 |
| Grant date | Dec 21, 1999 |
| Priority date | — |
| Expiry date | Jul 10, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T29/49016
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The specification describes techniques for fabricating tapered waveguides in planar photonic integrated circuits with the tapers formed in the z-direction (thickness). The tapers are formed by depositing the core layer in two operations. After depositing the first core layer, the layer is masked, and a step is formed in the first layer. When the second core layer is deposited over the step, a smooth taper results. The core layers are preferably formed by flame hydrolysis. During consolidation the two core layers coalesce into a single homogeneous layer with a smooth taper in the thickness dimension of the waveguide.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.