Pressure sensor using elements operating with acoustic surface waves (saw elements)

US6003378A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Holger Scherr · Munich, DE
• Gerd Scholl · Hersbruck, DE

Key dates

• Filing date: Sep 12, 1997
• Grant date: Dec 21, 1999
• Expiry date: Sep 12, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L9/0025
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure sensor with a reflective acoustic surface wave (SAW) delay line fashioned on a pressure-sensing membrane having at least three reflectors wherein the delay line extends over both an expanding region and a compressing region of the pressure-sensing membrane.