Apparatus and method for conveying a flexible sheet through manufacturing processes
US6003863A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 11, 1997 |
| Grant date | Dec 21, 1999 |
| Priority date | — |
| Expiry date | Mar 11, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/68778
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A flexible sheet to which manufacturing processes are to be applied is tensioned within a carrying fixture having tacky surfaces to which the flexible sheet is fastened. One version of the fixture includes an "L"-shaped attachment surface on a frame member and two tensioning members deflected toward the frame member in mutually perpendicular directions. When the flexible sheet has been fastened to the carrying fixture, the tensioning members are allowed to return toward their undeflected positions while applying tensioning forces to the flexible sheet. Another version of the fixture includes "L"-shaped attachment surfaces on both a frame member and a tensioning member. A loading station includes a stack of unprocessed flexible sheets, a fixture for deflecting tensioning member(s) within the carrying fixture, and a robot arm moving a transport fixture capable of carrying a flexible sheet and a carrying fixture. An unloading station includes a stack to processed flexible sheets, a fixture at which processed flexible sheets are separated from the carrying fixtures, and a similar robot arm with a similar transport fixture. A lower conveyor carries loaded fixtures from the loading stati…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.