Zirconia diaphragm structure and piezoelectric/electrostrictive film element having the zirconia diaphragm structure
US6004644A · kind A · utility
8Cited by
11References
22Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Aug 16, 1996 |
| Grant date | Dec 21, 1999 |
| Priority date | — |
| Expiry date | Aug 16, 2016 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/163
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A zirconia diaphragm structure, and a method of producing such structure in which the zirconia diaphragm structure includes a zirconia substrate having at least one window, and a zirconia diaphragm plate formed integrally with the zirconia substrate so as to close each window, the zirconia substrate comprising a zirconia material as a major component, and containing 0.1-3.0% by weight of alumina, 0.1-3.0% by weight of silica, 0.1-5.0% by weight of alumina and silica, 0.1-5.0% by weight of alumina and magnesia, or 0.1-5.0% by weight of alumina, silica and magnesia.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.