Scanning probe microscope
US6005246A · kind A · utility
42Cited by
2References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 8, 1998 |
| Grant date | Dec 21, 1999 |
| Priority date | — |
| Expiry date | Jul 8, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S977/873
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
There is disclosed a scanning probe microscope capable of producing a topographic image at a high resolution with a cantilever of a large spring constant and, at the same time, a surface potential image at a high resolution. This microscope can take the form of an atomic force microscope that detects the surface potential of a sample, using a force gradient acting between the probe tip and the sample. The gradient is represented by the output from a frequency-to-voltage converter.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.