Substrate tester method and apparatus having rotatable and infinitely adjustable locator jaws

US6005386A · kind A · utility

Assignee

• International Business Machines Corporation · US

Inventors

• Robert H. Cadwallader · Stanfordville, US
• Thomas Morrison · Pleasant Valley, US
• Klaus Probst · Herrenberg, DE
• Brian J. Wojszynski · Hyde Park, US
• William A. Yager · Salt Point, US

Key dates

• Filing date: Apr 17, 1997
• Grant date: Dec 21, 1999
• Expiry date: Apr 17, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01R31/2808
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

An apparatus for locating a workpiece on a processing surface includes a first locator arm assembly, a second locator arm assembly, and a pivotal member. The first locator arm assembly includes a first multiple position locator jaw disposed for lateral movement and mating engagement with a first portion of the workpiece. The second locator arm assembly includes a second multiple position locator jaw disposed for lateral movement parallel to the first multiple position locator jaw and further for mating engagement with a second, opposite side, portion of the workpiece. Lastly, the pivotal member is disposed for pivotal movement about a pivot point. The pivotal member is symmetrically coupled between the first locator arm assembly and the second locator arm assembly for inducing an equal but opposite lateral movement in the first and second locator jaws to accurately locate the workpiece on the processing surface between the first and second locator jaws as the locator jaws move towards one another.