Vapor deposition apparatus

US6007634A · kind A · utility

Assignee

• Inco Limited · CA

Inventors

• Rheinhart Weber · Perth, CA
• Michael Alberty · Backnang, DE
• George Paul Tyroler · Azilda, CA
• Ian Keith Passmore · Sudbury, CA

Key dates

• Filing date: Sep 2, 1997
• Grant date: Dec 28, 1999
• Expiry date: Sep 2, 2017

Classification

• Technology area (CPC C): Chemistry; Metallurgy
• CPC primary: C23C16/4586
• WIPO field: Surface technology, coating
• WIPO sector: Chemistry

Abstract

An apparatus (10) for decomposing and depositing gaseous metal carbonyls on a mandrel (36). A base plate (12) and cover (14) define a reaction chamber (20). A mandrel ring (28), nested within the base plate (12) and insulated therefrom, supports the mandrel (36). Heat transfer fluid flows through the mandrel ring (28) and into the mandrel (36) to maintain the mandrel (36) at a predetermined temperature to initiate thermal decomposition.