Transport module
US6010008A · kind A · utility
65Cited by
13References
19Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jul 11, 1997 |
| Grant date | Jan 4, 2000 |
| Priority date | — |
| Expiry date | Jul 11, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67383
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A module with an openable and closeable door has a central support structure which includes a machine interface exposed at the bottom of the module and integral wafer support columns extending upwardly in the module for supporting wafers. An advantage and feature of the invention is that a non-interrupted path-to-ground extends from each wafer support shelf to the machine interface. Additionally, the side walls of the shell have a recess portion with engagement members that cooperate with engagement members on removable handles. The handles utilize detents to rotatably lock such handles into place on the side walls of the carrier.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.