Nitrogen trifluoride production apparatus
US6010605A · kind A · utility
8Cited by
0References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Dec 26, 1996 |
| Grant date | Jan 4, 2000 |
| Priority date | — |
| Expiry date | Dec 26, 2016 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC25B15/08
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
Apparatus is disclosed for the production of nitrogen trifluoride (NF.sub.3), starting with an anhydrous molten flux including ammonia (NH.sub.3), a metal fluoride (MF), and hydrogen fluoride (HF). The apparatus includes an electrolyzer, an ammonia solubilizer, a hydrogen fluoride solubilizer, a nitrogen trifluoride reactor, two compressors, two pumps, three condensers a gas recycle loop, and, two flux loops of the same component ternary flux, but each loop with different concentration.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.