Universal mapping tool
US6011627A · kind A · utility
14Cited by
2References
16Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 7, 1998 |
| Grant date | Jan 4, 2000 |
| Priority date | — |
| Expiry date | Apr 7, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01L21/67259
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A universal mapping tool and method for mapping workpieces, such as semiconductor devices, is disclosed and described. The tool comprises a fixed and a movable gripping means adapted to mount a wide range of workpieces, means for optically locating the physical center of the workpiece fiducials mounted on the gripping means, and means for interpreting and storing the data obtained in the mapping operation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.