Gas sensor and method for manufacturing the same

US6012327A · kind A · utility

Assignee

• Siemens Aktiengesellschaft · DE

Inventors

• Michael Seth · Linden, DE
• Maximilian Fleischer · Ehrenkirchen, DE
• Hans Meixner · Haar, DE

Key dates

• Filing date: May 12, 1997
• Grant date: Jan 11, 2000
• Expiry date: May 12, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01N27/125
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A gas sensor and method for manufacturing a gas sensor is provided. In order to increase the selectivity and the sensitivity to a gas to be measured, a gas-sensitive gallium oxide layer of a gas sensor is coated with a filter layer that comprises silicon dioxide. In an alternative embodiment, the gallium oxide layer can be coated with a gas-sensitive metal oxide layer made of titanium oxide, aluminum vanadate, tungsten oxide or tantalum oxide.