Semiconductor device with refractory metal element
US6013926A · kind A · utility
68Cited by
7References
5Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 18, 1997 |
| Grant date | Jan 11, 2000 |
| Priority date | — |
| Expiry date | Apr 18, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH10D62/85
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
A semiconductor device includes a self-aligned refractory metal constituent in a recess in a semiconductor substrate and having the same plane pattern as a bottom surface of the recess. The width of the constituent is determined by the plane pattern of the recess and, accordingly, the pattern width of the constituent is easily controlled by the plane pattern of the recess.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.