Light modulator
US6014257A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Oct 14, 1998 |
| Grant date | Jan 11, 2000 |
| Priority date | — |
| Expiry date | Oct 14, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/02
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A modulator (10) for modulating an incident beam of light includes a substrate (14) having a cavity (32) formed therein and a plurality of spaced-apart deformable elements (12) formed in the cavity (32). The deformable elements (12) each has a base layer (16), a poled magnetic layer (18) formed in the base layer (16) and a first light reflection layer (20) deposited on the magnetic layer (18) for reflecting an incident beam of light. Between adjacent deformable elements on the base (12) of the cavity (32) is arranged a second light reflection layer (36). A conductive element (22, 24) formed in the substrate (14) electro-magnetically energizes the deformable elements (12) to deflect in the cavity (32). Incident light passing through each one of the first light reflection layers (20) is caused to destructively interfere with light reflected from the second light reflection layers (36) thereby causing modulation of the incident light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.