Apparatus for improving crystalline thin films with a contoured beam pulsed laser
US6014944A · kind A · utility
64Cited by
11References
9Claims
0Family size
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Key dates
| Filing date | Sep 19, 1997 |
| Grant date | Jan 18, 2000 |
| Priority date | — |
| Expiry date | Sep 19, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S117/904
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A method and apparatus is presented for crystallizing a thin film on a surate by generating a beam of pulsed optical energy, countouring the intensity profile of the beam, and illuminating the thin film with the beam to crystallize the thin film into a single crystal lattice structure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.