Micro swivel actuators and a procedure for the production of the same

US6016217A · kind A · utility

Assignee

• CMS Mikrosystene GmbH Chemnitz · DE

Inventors

• Wolfram Dotzel · Chemnitz, DE
• Thomas Gessner · Plymouth, US
• Ramon Hahn · Chemnitz, DE
• Christian Kaufmann · Sindelfingen, DE
• Heinz-Ulrich Lowe · Flöha, DE
• Joachim Markert · Augsburg, DE
• Manfred Rauch · Sasbach, DE
• Udo Wollmann · Chemnitz, DE

Key dates

• Filing date: Jul 20, 1998
• Grant date: Jan 18, 2000
• Expiry date: Jul 20, 2018

Classification

• Technology area (CPC G): Physics
• CPC primary: G02B26/0841
• WIPO field: Optics
• WIPO sector: Instruments

Abstract

The invention refers to micro swivel actuators and a procedure for the manufacturing of the same. The micro swivel actuators consist basically of a semiconductor wafer equipped with three layers, which contains on the one hand individual mirrors with integrated springs and support elements as mechanical components and on the other hand electrodes, feeder lines and electrical contacts as electrical arrangements. The manufacturing of the micro swivel actuators utilizes procedure steps from the field of surface micromechanics, so that well-tried technologies are being applied. The micro swivel actuators, especially the micromechanical mirror arrays, are in particular suited for applications in the pictorial reproduction technique via laser beam. With these actuators, a laser beam can be directed by turning several parallel triggered individual mirrors.