Coordinated X-Y stage apparatus
US6016607A · kind A · utility
45Cited by
8References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Apr 28, 1999 |
| Grant date | Jan 25, 2000 |
| Priority date | — |
| Expiry date | Apr 28, 2019 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T74/20213
- WIPO fieldMedical technology
- WIPO sectorInstruments
Abstract
An apparatus based on precision X-Y stages that are stacked. Attached to arms projecting from each X-Y stage are a set of two axis gimbals. Attached to the gimbals is a rod, which provides motion along the axis of the rod and rotation around its axis. A dual-planar apparatus that provides six degrees of freedom of motion precise to within microns of motion.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.