Aerosol-generated sol-gel derived thin films and applications thereof
US6016689A · kind A · utility
8Cited by
6References
18Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 18, 1996 |
| Grant date | Jan 25, 2000 |
| Priority date | — |
| Expiry date | Nov 18, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N33/552
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A sensor having a substrate overlayed with a sol-gel layer, a chemical sensing species deposited upon the sol-gel layer, and a thin film of a second sol-gel layer overlaying and entrapping the species. The effect of this sensor is that the species exhibits a significant portion of its intrinsic function over a period of time. In yet another embodiment of the subject invention, a method is disclosed to form a thin sol-gel layer upon an ambient substrat. This method ensures the integrity, stability and functionality of the chemical sensing species within the sol-gel layers.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.