Method of and an apparatus for photothermally examining workpiece surfaces
US6019504A · kind A · utility
4Cited by
7References
17Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 29, 1997 |
| Grant date | Feb 1, 2000 |
| Priority date | — |
| Expiry date | May 29, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01N25/72
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A method of photothermally examining workpiece surfaces, wherein an electromagnetic exciting beam is directed from a measuring unit to a point to be measured on the workpiece surface so as to heat the workpiece surface at that point and, furthermore, the heat radiation emitted from the point to be measured is detected and analyzed, is characterized in that a plurality of selected points to be measured on the workpiece surface are irradiated by at least a partial beam of the exciting beam, and the heat rays issuing from the points to be measured are sensed and subjected to joint analysis.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.