Mosaic polishing pads and methods relating thereto
US6019666A · kind A · utility
38Cited by
11References
21Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | May 8, 1998 |
| Grant date | Feb 1, 2000 |
| Priority date | — |
| Expiry date | May 8, 2018 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB24D7/066
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
This invention provides polishing pad tiles which, by virtue of their geometry and surface features, can be arranged to form mosaic pads having channels at the seams which facilitate the flow of polishing fluid during polishing of a workpiece.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.