Patent · US Expired

Intergrated circuit die assembly

US6020646A · kind A · utility

25Cited by
12References
17Claims
0Family size

Assignee

Inventors

Key dates

Filing dateDec 5, 1997
Grant dateFeb 1, 2000
Priority date
Expiry dateDec 5, 2017

Classification

  • Technology area (CPC H)Electricity
  • CPC primaryH01L2924/19107
  • WIPO fieldSemiconductors
  • WIPO sectorElectrical engineering

Abstract

An integrated circuit (IC) die carrier assembly includes a thinned IC die mounted to a substrate or carrier. The IC die is mounted to the carrier via a thin layer of glass. The carrier facilitates fixturing and provides support during the lapping process used to thin the die. Ball bonding, wire bonding, thin film or thick film conductors can be used to interconnect the pads on the IC die to the pads on the carrier. The coefficients of the thermal expansion of the IC die and the carrier are closely matched to avoid damage to the IC die due to uneven expansion of the thinned IC die relative to the carrier. The IC die carrier assembly is better suited for ultrahigh vacuum and high temperature environments than conventional IC die carrier assemblies.

Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.