Phase interference microscope
US6020965A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Mar 5, 1998 |
| Grant date | Feb 1, 2000 |
| Priority date | — |
| Expiry date | Mar 5, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01B11/303
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A phase interference microscope, comprising a light source for emitting coherent light with a constant wavelength, an interference optical system for splitting the light emitted from the light source into two light beams, irradiating one of the split light beams onto a sample and the other split light beam onto a reference mirror, and making the light beam reflected from the sample interfere with the light beam reflected from the reference mirror, a focusing device for recognizing a position of a middle point in a phase anomaly of interference light generated in the vicinity of a focusing point as a focusing point for the sample, and moving the sample to the focusing position, and a size measurement device for measuring a size of the sample on the basis of the interference light.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.