Process and leak detector for inspecting a plurality of similar test bodies for leaks
US6021663A · kind A · utility
5Cited by
6References
2Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 19, 1999 |
| Grant date | Feb 8, 2000 |
| Priority date | — |
| Expiry date | Mar 19, 2019 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01M3/202
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A process is disclosed for inspecting a plurality of similar test bodies for leaks. The test bodies are first evacuated by a fore-vacuum vacuum pump (evacuation mode), down to a pressure P.sub.u, selected to ensure that the maximum admissible pressure in the mass spectrometer (5) is not exceeded when the measurement mode is switched on, and then the evacuation mode is switched to a measurement mode by opening the second valve (16). In order to shorten evacuation times, a learning process is used to determine the optimum switching pressure P.sub.u opt.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.