Active anti-vibration apparatus
US6021991A · kind A · utility
41Cited by
8References
15Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Mar 18, 1998 |
| Grant date | Feb 8, 2000 |
| Priority date | — |
| Expiry date | Mar 18, 2018 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16F15/027
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
An active anti-vibration apparatus includes an anti-vibration mount, which has an actuator and a vibration sensor, for supporting an anti-vibration table, and a control unit for driving the actuator on the basis of output from the vibration sensor. The control unit separates the output from the vibration sensor into high frequency components and low frequency components, applies proper compensation calculation for the respective separated frequency components, and drives the actuator.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.