Optical system for optical beam scanning
US6022115A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jun 15, 1998 |
| Grant date | Feb 8, 2000 |
| Priority date | — |
| Expiry date | Jun 15, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B26/126
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The present invention is directed to an optical system for measurement of a three dimensional device. The optical system is designed and configured to meet telecentric and f-.theta. requirements. The system employs primary and secondary mirrors operating in conjunction with a tertiary deflector mounted on a pivot. Light from a light source produces a beam which is deflected off the deflector and the secondary and primary reflectors respectively. The beam is then transmitted to the surface of the object to be measured. Deflection of the tertiary deflector on the pivot results in scanning of the light beam across the surface of the object to be measured.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.