Single body injector and method for delivering gases to a surface
US6022414A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 14, 1997 |
| Grant date | Feb 8, 2000 |
| Priority date | — |
| Expiry date | Jul 14, 2017 |
Classification
- Technology area (CPC C)Chemistry; Metallurgy
- CPC primaryC23C16/45595
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
A single body injector for delivering gases to a surface is provided. The injector is comprised of an elongated member with end surfaces and at least one gas delivery surface extending along the length of the member and which includes a number of elongated passages formed therein. Also formed within the member are a number of thin distribution channels which extend between the elongated passages and the gas delivery surface. In another embodiment of the invention a number of metering tubes may be inserted into each elongated passage and are spaced from the walls of the passages and extend between the ends. Gases are conveyed to the elongated passages, through the distribution channels to the gas delivery surface where they are directed to a desired region where they mix, react and form a uniform thin film on the substrate positioned beneath the injector. The gas delivery surface is comprised of rounded side regions and a center recessed region in which instance the thin distribution channels extend between the first elongated passages and the center recessed region of the gas delivery surface. In another embodiment, the injector further contains an elongated passage for receiving a…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.