Enhanced inductively coupled plasma reactor
US6022460A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Mar 22, 1999 |
| Grant date | Feb 8, 2000 |
| Priority date | — |
| Expiry date | Mar 22, 2019 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J37/3266
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An enhanced inductively coupled plasma reactor which comprises; a chamber; a power supply for providing radio-frequencies necessary to generate plasma within the chamber; an antenna for producing electric fields and magnetic fields with a radio-frequency power from the power supply to generate plasma within the chamber; Helmholtz coils for shaking the plasma with intermittent modulation of a weak magnetic field to increase the density of the plasma and decrease the electron temperature and enhance the uniformity of the plasma, the Helmholtz coils consisting of two coils which are symmetrically arranged with a common axis, winding around the chamber at an upper position and a lower position, respectively, the weak magnetic field being produced by providing a combination of a direct current and an alternating current to the Helmholtz coils; a wafer stage and support; a bias RF power supply for controlling ion energies, connected to the wafer stage; and a matching box for optimally controlling and transferring the power from the bias RF power supply. Axis-directed magnetic fields which vary with time are formed by the provision of the combination of the currents. When they are control…
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.