Pressure transducer with error compensation from cross-coupling outputs of two sensors

US6023978A · kind A · utility

Assignee

• Honeywell Data Instruments Inc. · US

Inventors

• Dennis Dauenhauer · Sunnyvale, US
• Dale Allan Dauenhauer · San Jose, US
• Alexander Breitenbach · Gräfelfing, DE
• Herman W. Erichsen · Holliston, US

Key dates

• Filing date: Jul 10, 1997
• Grant date: Feb 15, 2000
• Expiry date: Jul 10, 2017

Classification

• Technology area (CPC G): Physics
• CPC primary: G01L19/142
• WIPO field: Measurement
• WIPO sector: Instruments

Abstract

A pressure transducer that includes at least two sensors having substantially similar or substantially identical error characteristics, wherein each sensor is arranged to be subjected to an applied pressure and the outputs of the sensors are electrically coupled so that errors associated with one sensor are compensated by errors associated with the other sensor. The sensors may be substantially identical silicon sensors formed in close proximity on the same wafer.