Vacuum chamber made of aluminum or its alloys, and surface treatment and material for the vacuum chamber
US6027629A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | May 16, 1997 |
| Grant date | Feb 22, 2000 |
| Priority date | — |
| Expiry date | May 16, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T428/249956
- WIPO fieldSurface technology, coating
- WIPO sectorChemistry
Abstract
The present invention relates to a vacuum chamber and chamber parts made of aluminum or its alloys which exhibit excellent corrosion resistance to a corrosive gas or plasma introduced into the vacuum chamber, the surface treatment, and material for the vacuum chamber. The vacuum chamber has a porous layer with a structure in which a pore diameter at the top thereof is small, while a pore diameter at the bottom thereof is large. In order to give such a structure to the porous layer, a final anodizing voltage is set to be higher than an initial anodizing voltage when the surface of the base material is anodized. After the porous-type anodizing is completed, non-porous type anodizing may be conducted so as to grow a barrier layer. Furthermore, the base material made of aluminum alloy preferably has particles such as precipitates and/or deposits with a diameter of 10 .mu.m or less in average, and the precipitates and/or deposits are arranged in parallel with a largest surface of the base material.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.