Micromachined piezoelectric transducer
US6028389A · kind A · utility
24Cited by
3References
15Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | May 26, 1998 |
| Grant date | Feb 22, 2000 |
| Priority date | — |
| Expiry date | May 26, 2018 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH04R17/08
- WIPO fieldAudio-visual technology
- WIPO sectorElectrical engineering
Abstract
A micromachined piezoelectric acoustic transducer includes a substrate; at least one piezoelectric actuator means attached at at least one proximal edge to the substrate; a gap around at least a portion of the remaining edges of the piezoelectric actuator means; and a flexible corrugated membrane in at least a portion of the gap and interconnecting the actuator means with at least one of the substrate or a neighboring actuator means.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.