Plasma discharge emitter device and array
US6028615A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 18, 1997 |
| Grant date | Feb 22, 2000 |
| Priority date | — |
| Expiry date | Aug 18, 2017 |
Classification
- Technology area (CPC B)Performing Operations; Transporting
- CPC primaryB41J2/395
- WIPO fieldElectrical machinery, apparatus, energy
- WIPO sectorElectrical engineering
Abstract
An inexpensive, robust plasma discharge emitter that repeatably creates a patterned charge on a substrate. To facilitate highly accurate charge deposition, each emitter contains a plasma well for confining the plasma within the emitter. Additionally, a plurality of emitters are arranged in an array to provide a practical charge patterning device. Furthermore, to fabricate an emitter or an array of emitters, a relatively low-cost, repeatable method of fabrication is used that relies upon conventional integrated circuit fabrication techniques.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.