High aspect ratio containers for ultrahigh purity chemicals
US6029717A · kind A · utility
17Cited by
36References
12Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 29, 1996 |
| Grant date | Feb 29, 2000 |
| Priority date | — |
| Expiry date | Nov 29, 2016 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG01F23/72
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
Containers for ultrahigh purity chemicals having aspect ratios of greater than 3:1 and methods of making the same from seamless electropolished stainless steel tubing are described. Chemical delivery systems for semiconductor fabrication processes that utilize these high aspect ratio containers also are described.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.