Vacuum apparatus and a method of controlling a suction speed thereof
US6030181A · kind A · utility
10Cited by
1References
5Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Feb 5, 1998 |
| Grant date | Feb 29, 2000 |
| Priority date | — |
| Expiry date | Feb 5, 2018 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF04C2270/42
- WIPO fieldEngines, pumps, turbines
- WIPO sectorMechanical engineering
Abstract
A vacuum apparatus including at least one vacuum pump having at least one stage and high-vacuum and fore vacuum connections, and a connection line communicating a point located between the high vacuum and fore vacuum connections with the high vacuum connection; and a method for controlling a suction speed of the at least one vacuum pump.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.