Process and apparatus for the formation of patterns in a photoresist by continuous laser irradiation, application to the production of microtips emissive cathode electron sources and flat display screens
US6030266A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Jul 23, 1997 |
| Grant date | Feb 29, 2000 |
| Priority date | — |
| Expiry date | Jul 23, 2017 |
Classification
- Technology area (CPC H)Electricity
- CPC primaryH01J2329/00
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
Process and apparatus for the formation of patterns in a photosensitive resin layer or photoresist by continuous laser irradiation, application to the production of microtip emissive cathode electron sources and flat display screens. Formation takes place of non-mutually interfering elementary light beams (41), there is at least one relative translation at constant light power and speed of said beams with respect to the layer in order to irradiate lines thereof, each line receiving a light dose lower than that necessary for the development of the resin, a relative rotation of all the beams with respect to the layer takes place, the translation is recommenced in order to irradiate other lines, each line receiving a light dose complimentary to the preceding dose and the resin is developed.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.