Method for fabricating metal micropatterns

US6030515A · kind A · utility

Assignee

• Robert Bosch GmbH · DE

Inventors

• Klaus Heyers · Reutlingen, DE
• Bernhard Elsner · Bad Berka, DE

Key dates

• Filing date: Jul 23, 1998
• Grant date: Feb 29, 2000
• Expiry date: Jul 23, 2018

Classification

• Technology area (CPC B): Performing Operations; Transporting
• CPC primary: B81C2201/0109
• WIPO field: Micro-structural and nano-technology
• WIPO sector: Chemistry

Abstract

A method for fabricating metal micropatterns. Trenches are introduced into a polymer layer. These trenches are filled with the metal micropatterns using an electroplating process. Before the deposition of the metal micropatterns, the side walls of the trenches are covered with insulating layers which adhere to the metal micropatterns after the polymer layer is removed.