Ultra-high vacuum apparatus
US6031235A · kind A · utility
4Cited by
3References
24Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 24, 1999 |
| Grant date | Feb 29, 2000 |
| Priority date | — |
| Expiry date | Jun 24, 2019 |
Classification
- Technology area (CPC F)Mechanical Engineering; Lighting; Heating
- CPC primaryF16K51/02
- WIPO fieldMechanical elements
- WIPO sectorMechanical engineering
Abstract
A vacuum container is evacuated to be kept at an ultra-high vacuum. Valve means is provided for connecting and disconnecting the inside of the vacuum container with and from the outside thereof, and includes a vacuum-tight seal made of a high polymer having a water absorptivity of 0.1% and less and an outgassing rate of 2.times.10.sup.-6 (Torr.multidot.l/sec/cm.sup.2 :at 200.degree. C.) and less.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.