Confocal microscopic equipment
US6031661A · kind A · utility
Assignee
Inventor
Key dates
| Filing date | Jan 5, 1998 |
| Grant date | Feb 29, 2000 |
| Priority date | — |
| Expiry date | Jan 5, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG02B21/006
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A confocal microscopic equipment for measuring the solid shape of a sample at high speeds, and which does not require scanning of an irradiating light beam, wherein are provided a light source, apertures on which the output beam from the light source is irradited, an objective lens that forms stationary images of the apertures on the sample and collects the reflected or fluorescent light from the sample, a photo detector, and a beam splitter that makes the beam that has passed through the apertures incident to the objective lens by transmission or reflection and focuses the output beam from the objective lens on the photo detector by reflection or transmission.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.