Pressure sensor and method for detecting pressure
US6032536A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 28, 1998 |
| Grant date | Mar 7, 2000 |
| Priority date | — |
| Expiry date | Sep 28, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03G2215/00721
- WIPO fieldMeasurement
- WIPO sectorInstruments
Abstract
A pressure sensor is provided which can detect the presence, absence or magnitude of pressure. The pressure sensor includes a sensor membrane and a sensor device. The sensor membrane is flexible and may be constructed of a conductive material or may include a flexible film attached to a conductive film. The sensor device includes an electrode substrate having an electrode surface and a set of electrodes disposed on the electrode surface. As pressure is applied to the sensor membrane, the sensor membrane distends or deforms towards the electrode set positioned on the electrode surface. As sufficient pressure is applied, the sensor membrane will make both electrical and mechanical contact with at least two of the electrodes. Since the sensor membrane is conductive, the contacted electrodes will be in electrical connection with each other. As pressure is increased, additional electrodes will be contacted and placed in electrical contact with each other. As a result, the presence, absence or magnitude of pressure exerted on the sensor membrane may be determined. The pressure sensor may be utilized in a variety of environments to sense either fluid pressure or physical contact pressure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.