Hybrid silicon-based micro-electromagnetic light shutter
US6033131A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Sep 30, 1998 |
| Grant date | Mar 7, 2000 |
| Priority date | — |
| Expiry date | Sep 30, 2018 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03B9/08
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
A hybrid, micro-electromagnetic light shutter includes a silicon body having a top surface with an arcuate groove formed on the top surface. A recess and a light aperture are formed in the top surface of the silicon body proximate to the arcuate groove. A shutter assemblage generally comprising metallic elements is provided with a rotatable shutter blade fixedly attached to a means for rotating. The means for rotating has a micro-magnetic element that interacts magnetically with an electromagnet for producing rotational movement. The shutter assemblage is arranged in the recess of the silicon body so that the means for rotating can be supported during rotation by the arcuate groove and be activated for rotational movement by the electromagnet.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.