Detailing and cleaning apparatus for green ceramic dry dicing process
US6033289A · kind A · utility
Assignee
Inventors
Key dates
| Filing date | Aug 25, 1998 |
| Grant date | Mar 7, 2000 |
| Priority date | — |
| Expiry date | Aug 25, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10T83/8776
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
An apparatus for processing a ceramic laminate comprising an array of unfired ceramic substrates having intersecting slots in at least two directions formed on a side thereof. The apparatus includes a frame and a vacuum chuck fixture movable with respect to the frame for securing the laminate. A plurality of the blade assemblies are independently movable and adapted for passage through different slots in the laminate to loosen debris therefrom. Each blade assembly comprises a pair of blade portions having opposed and spaced tapered cutting edges biased against the wall of the slot by a spring. The pair of blade portions is adapted for lateral movement during passage along the slot toward and away from the slot wall, wherein one of the blade portion pairs guides the other of the blade portion pairs for contact with the slot wall. A flexible cleaner includes fabric pads, an oscillating brush and a vacuum cleaner and passes along the slot after passage of the blade assembly to remove loosened debris from the slot.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.