Antireflective coating compositions
US6033830A · kind A · utility
28Cited by
9References
14Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Nov 7, 1997 |
| Grant date | Mar 7, 2000 |
| Priority date | — |
| Expiry date | Nov 7, 2017 |
Classification
- Technology area (CPC G)Physics
- CPC primaryG03F7/091
- WIPO fieldOptics
- WIPO sectorInstruments
Abstract
The invention provides new light absorbing crosslinking compositions suitable for use as an antireflective composition (ARC), particularly for deep UV applications. The ARCs of the invention in general comprise a crosslinker and novel ARC resin binders that effectively absorb reflected deep UV exposure radiation.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.