Apparatus for producing semiconductors and other devices and cleaning apparatus
US6035871A · kind A · utility
39Cited by
21References
9Claims
0Family size
Assignee
Inventor
Key dates
| Filing date | Mar 18, 1998 |
| Grant date | Mar 14, 2000 |
| Priority date | — |
| Expiry date | Mar 18, 2018 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldSemiconductors
- WIPO sectorElectrical engineering
Abstract
Provided is an apparatus for producing semiconductor and other devices, which can improve the quality of deposited films and increase the yield of produced devices in comparison with the conventional apparatus. The apparatus of the invention comprises a plurality of dry treatment chambers (7a, 7b, 7c, 7d, 7e), a transfer room (6) interconnecting the dry treatment chambers (7a, 7b, 7c, 7d, 7e), loading/unloading chambers (8a, 8b, 8c, 8d), and a cleaning apparatus (13). The transfer room (6) and the cleaning apparatus (13) are directly or indirectly connected to each other.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.