Eliminating stiction with the use of cryogenic aerosol
US6036786A · kind A · utility
13Cited by
56References
27Claims
0Family size
Assignee
Inventors
Key dates
| Filing date | Jun 11, 1997 |
| Grant date | Mar 14, 2000 |
| Priority date | — |
| Expiry date | Jun 11, 2017 |
Classification
- Technology area (CPC Y)Emerging Cross-Sectional Technologies
- CPC primaryY10S134/902
- WIPO fieldMachine tools
- WIPO sectorMechanical engineering
Abstract
Stiction in a microstructure may be eliminated by directing a cryogenic aerosol at the portion of the microstructure subject to stiction with sufficient force so as to free the portion of the microstructure.
Source: USPTO / EPO open patent data. Objective bibliographic and citation counts.